Contribution to Next Generation Technology
(SEMICONDUCTOR Miniaturization to 22nm/18nm)
N2 purge application
300mm FOUP Load Port
(SELOP12F25-S7-N Series)
Prevent cross contamination and surface oxidation
Quickly control wafer in FOUP through Loadport N2 purge function
- Control nozzle upward timing
- Interference avoidance of Kinematic Pin at FOUP placement
- Compatibility of non-N2 purge Applicable FOUP
- Adjustment function of nozzle pressure
- Nozzle up and down position checking function (Sensor)
- Exchangeable nozzle heads for Suitable attach to ports
N2 purging on Carrier Base
- Adapted FOUP Type: ENTEGRIS A-300, Spectra
(4 Purge Port Type)
Monitoring N2 Gas flow rate by flow meter
Preventing contamination through purge port
- (1)GAS-Filter at INLET Port side
- (2)Adhesion to Grommet of FOUP-side
