Semiconductor

NEW

Smart SELOP-7
NEW Series LOAD PORT
200mm Wafer is also available to
300mm Wafer LP by just setting Open Cassette Adapter.

One Configuration Available in Both 300mm and 200mm.

300/200mm Wafer Auto Switching Load Port

features

300/200mm Wafer mapping function (No Change Required)

Preventing mechanism for wafer protrusion.

Safety lock function to keep adapter door close when wafer is being transported.

自動識別機能付

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300mm Wafer FOUP or 200mm Wafer Open cassette
Automatically changes Load Port parameter and notify to Host

Operation Flow

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