300mm/200mm
搭载自动切换功能的 Load Port
可兼容300及200mm晶員的 新一代机型
只需对300mmFOUP及200mm Open Cassette适配器进行切换即可使用!
搭载载具自动识别功能
对应Mapping
搭载晶圆弹出传感器
Two types of Open Cassette Adapter
Many Experiences
Tilt type
Low cost model
Horizontal type
Tilt type
Operation Flow
Specification
| LOAD PORT | SELOP08C12F-S81 Series |
|---|---|
| Dimensions | W474mm x D547mm x H1381mm（Load Port） |
| W455mm x D300mm x H432mm（Tilt-type 200mmOCA） | |
| W430mm x D315mm x H373mm（Horizontal-type 200mmOCA） | |
| Weight | 65kg（LP） |
| 13.2kg（Tilt-type 200mmOCA） | |
| 8.5kg（Horizontal-type 200mmOCA） |
| 200mm wafer operation | 300mm wafer operation | |
|---|---|---|
| Application | 200mm 25 slot cassette (SEMI-Standard) |
300mm 25 slot FOUP (SEMI-Standard) |
| Cycle time | Open：11sec.(including mapping)、 Close：7sec.(excluding mapping) |
Open：12sec.(including mapping)、 Close：9sec.(excluding mapping) |
| Door holding method | N/A | Vacuum absorption method |
| Detecting function |
①Open Cassette normal placement ②Stage normal placement ③Wafer mapping ④Wafer protrusion ⑤Hand safety |
①FOUP normal placement ②Foup door checking ③Wafer mapping ④Wafer protrusion ⑤Hand safety |
| Standard feature |
①Wafer mapping ②Controller ③Carrier base placement adjustment mechanism ④Bolts surface position adjustment mechanism |
|
| ⑤Cassette side-slip Prevention ⑥300mmFOUP Infopad pin holder ⑦Stage fixation at wafer horizontal position ⑧Minimizing vibration in rotating and Power |
||
| Utility |
①Power：DC24V 5A ②CDA：0.45～0.6 MPa 20 L/min ③Vacuum：-40kPa 5L/min |
|
| Communication interface | RS232C or Ethernet ※2 | |
| Options |
①Customizable indicator panel ②Customizable switch panel ③Applicable to AC200V ④Applicable to FOSB※1 ⑤E84 ⑥E84,CID Communication（300mmFOUP only） |
|
- ※1Depending on FOSB type, performance may vary. Please contact us for details.
- ※2Ethernet is either a registered trademark or a trademark of Xerox Corporation in the United States and/or other countries.
Outline Drawing
