Contributing to quality improvement in semiconductor device manufacturing

Contribution to Further Miniaturization (1xnm)/300mm FOUP Load Port SELOP-8/N2 purge/300mm 300mm FOUP LOAD PORT/SELOP-7/300mm
300mm/200mm Wafer Auto Switching Load Port/SELOP-7/300mm Wafer FOUP/200mm Wafer Open cassette 300mm FOUP LOADER MODULE/EFEM/300mm
300mm LOADER N2 EFEM System/N2 purge LED/Power Semiconductor Wafer/Automated Wafer Transportation System/N2 purge