Semiconductor Equipment
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Contribution to Further Miniaturization (1xnm)
300mm FOUP Load Portnew
(Smart SELOP-8 Series)Extreamly Smooth
FOUP door Open/Close MotionGreat improvement of particle performance. Reduction of vibration during door open/close by hybrid of pneumatic and electric driven mechanism. Compliance of high sealed FOUP. 
Features
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1N2 purging on Carrier Base
Adapted FOUP Type: ENTEGRIS A-300, Spectra (4 Purge Port Type)
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2Purge Clean N2 Gas
- Filters, installed just in front of the nozzle, can block particle from entering to FOUP
- Adhesion to Grommet of FOUP
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3Monitor N2 Gas flow rate by flow meter
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4Control N2 Gas flow rate by MFC
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5Feild Upgrade from Standard SELOP8 to N2 Purge Load Port is possible
N2 purging on Carrier Base
Superior Stable N2 Purge by Original movable nozzle. Patent pending
- Control nozzle up/down timingAvoid interference to Kinematic Pin during FOUP placement Interoperatability of non-N2 purge FOUP
- Adjustment function of nozzle pressure
- Exchangeable nozzle heads for Suitable attach to ports
- Nozzle up / down position detect function (Sensor)