Semiconductor

Supporting Highly Efficient and Stable Wafer Sorting

Sorter

NEW

features

Equipmented with High reliablity
and long selling SELOP series

Installation of N2Purge Loadports (Options)

Particle free

Realized by original airflow and sationary robot

High Throuput

Minimum footprint

SEMI standard software (support GEM300)

Abundant variations (2x2, 3x3,4x4 port)

options

  • ・Wafer invert function
  • ・Area sensor
  • ・Lighting inside EFEM
  • ・Vacuum-chucking finger type
  • ・E84 interface
  • ・Signal tower
  • ・Ionizer