Semiconductor Equipment
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300mm LOADER MODULE
300mm EFEM
(SELME series)More Professionally, More Efficiently Support Semiconductor Technology
300mm Wafer transport robot 
300mm FOUP LOADER MODULE
Features
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1Vacuum-Less / Vacuum Wafer Handling (Clean Class 1)
reduce adhearing particles on back side of wafer
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2Application to 200mm Wafer and Quartz Wafer
(300mm Option)
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3High Speed and Accurate Wafer Handling (±0.05mm)
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4Installation of N2 Purge Loadports
(Option)
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5Standard 3 Loadport Type + Extendable Module
(Option)
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6Corrosion Resistance Compliance
(Option)