200mm SMIF LOADER
SMIF LOADER (SELME series)
Original solution improvable for open cassette to SMIF
Small foot print / Flexible cassette transfer operation / High cost performance /
Clean cassette transfer / Simplified operation, maintenance
Applicable for clean class1 (FFU option)
The cassette transfer is executed within ME under well controlled air flow
Easy modification of the existing process equipment
Various product line-up with combination of No.s of Pod and equipment width
High transport efficiency with originally designed arm robot
Flexible cassette transfer between Pod and EQ stage (1 to 1 or "n" to "n")
High reliability with a lot of supply records
Wide application to the existing second hand EQ
