Contribution to Further Miniaturization (1xnm)
300mm FOUP Load Port
(Smart SELOP-8 Series)
FOUP door Open/Close Motion
Great improvement of particle performance. Reduction of vibration during door open/close by hybrid of pneumatic and electric driven mechanism.
Compliance of high sealed FOUP.
- Control nozzle up/down timing
- Avoid interference to Kinematic Pin during FOUP placement
- Interoperatability of non-N2 purge FOUP
- Adjustment function of nozzle pressure
- Exchangeable nozzle heads for Suitable attach to ports
- Nozzle up / down position detect function (Sensor)