Contribution to Further Miniaturization (1xnm)
300mm FOUP Load Port
(Smart SELOP-8 Series)
Extreamly Smooth
FOUP door Open/Close Motion
Great improvement of particle performance. Reduction of vibration during door open/close by hybrid of pneumatic and electric driven mechanism.
Compliance of high sealed FOUP.
- Control nozzle up/down timing
- Avoid interference to Kinematic Pin during FOUP placement
- Interoperatability of non-N2 purge FOUP
- Adjustment function of nozzle pressure
- Exchangeable nozzle heads for Suitable attach to ports
- Nozzle up / down position detect function (Sensor)
N2 purging on Carrier Base
- Adapted FOUP Type: ENTEGRIS A-300, Spectra
(4 Purge Port Type)
Purge Clean N2 Gas
- (1)Filters, installed just in front of the nozzle, can block particle from entering to FOUP
- (2)Adhesion to Grommet of FOUP
Monitor N2 Gas flow rate by flow meter
Control N2 Gas flow rate by MFC
Feild Upgrade from Standard SELOP8 to N2 Purge Load Port is possible
N2 purging on Carrier Base
