Particle free

Original method prevents particle from penetrating into FOUP

Reliability

• (1)High productivity and abundant supply reference
• (2)Working in the most of 300mm semiconductor plants in the world
• (3)MCBF 870,000 times achieved

Compatibility

• (1)Applicable to various FOUPs (Entegris, Shin-Etsu, Asyst, etc)
• (2)Command control using RS232C

Originality

Highly accurate mapping technology (Wafer Presence, Double, Cross)

Easy maintenance

• (1)Supporting tool software using PC
• (2)All resin surface finishing making it free from stain or scratch
• (3)High maintenanceability by front access to moving axes
• (4)Communication log func

Easy installation

• (1)BOLTS surface position adjustment mechanism
• (2)Undock position adjustment function (for adjustment with OHT line)
• (3)Self-standing caster as a standard function

Line-up of various Options

• (1)Applicable to any option requirement by world-wide end-users

Large indicator

Easily viewable large indicator

Minimum lead time