Semiconductor

NEW

300mm FOUP LOAD PORT
Smart SELOP-7 (SELOP12F25-S7series)

High Reliability, Shipment Volume No.1!

SELOP-7 applicable to all the fabs with newly designed large indicator

features

1.Particle free

Original Door Opening Technology - Prevents Particle penetration

2.Reliability

  • (1)High productivity and abundant supply reference
  • (2)Working in the most of 300mm semiconductor plants in the world
  • (3)MCBF 870,000 cycles achieved

3.Compatibility

  • (1)Applicable to various FOUPs (Entegris, Shin-Etsu, Miraial,, etc)
  • (2)RS232C Command control
  • (3)200mm wafer solution (option adapter)
  • (4)E84, CID communication

4.Originality

  • (1)Highly accurate mapping technology (Wafer Presence, Double, Cross)
  • (2)Thin wafer mapping

5.Easy maintenance

  • (1)PC Based support software
  • (2)All resin surface finishing free from stain and scratch
  • (3)Easy maintenance access from front
  • (4)Communication log record function

6.Easy installation

  • (1)BOLTS position adjustment mechanism
  • (2)Undock position adjustment function (Adjustable to OHT line)
  • (3)Self-standing caster as a standard function

7.Large indicator

Easily viewable large indicator

8.Minimum lead time