Particle free

Original Door Opening Technology - Prevents Particle penetration

Reliability

• (1)High productivity and abundant supply reference
• (2)Working in the most of 300mm semiconductor plants in the world
• (3)MCBF 870,000 cycles achieved

Compatibility

• (1)Applicable to various FOUPs (Entegris, Shin-Etsu, Miraial,, etc)
• (2)RS232C Command control
• (3)200mm wafer solution (option adapter)
• (4)E84, CID communication

Originality

• (1)Highly accurate mapping technology (Wafer Presence, Double, Cross)
• (2)Thin wafer mapping

Easy maintenance

• (1)PC Based support software
• (2)All resin surface finishing free from stain and scratch
• (3)Easy maintenance access from front
• (4)Communication log record function

Easy installation

• (1)BOLTS position adjustment mechanism
• (2)Undock position adjustment function (Adjustable to OHT line)
• (3)Self-standing caster as a standard function

Large indicator

Easily viewable large indicator

Minimum lead time