Automated Wafer Transportation System
for LED/Power Semiconductor
New Transfer Unit
Applicable for increasing size of LED/Power Semiconductor Wafer
300/200mm Wafer mapping function (No Change Required)
Power saving technology by Auto set and transfer Wafer between Cassette and Process system
High yield due to handling in clean N
2
atmosphere (by N
2
Circulation)
(decrease particle, moisture and O
2
)
High productivity due to capable of handling hot Wafer after process
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