Semiconductor

NEW

450mm EFEM, 300mm EFEM
MINI ENVIRONMENT SYSTEM
(SELME series)

More Professionally, More Efficiently Support Semiconductor Technology

features

1.Vacuum-Less / Vacuum Wafer Handling (Clean Class 1)

reduce adhearing particles on back side of wafer

2.Application to 200mm Wafer and Quartz Wafer

(300mm Option)

3.High Speed and Accurate Wafer Handling (±0.05mm)

 

4.Installation of N2 Purge Loadports

(Option)

5.Standard 3 Loadport Type + Extendable Module

(Option)

6.Corrosion Resistance Compliance

(Option)

450mm Wafer transport robot

300mm Wafer transport robot

450mm FOUP LOADER MODULE

300mm FOUP LOADER MODULE