Particle free

• (1)Original Door opening Technology prevents particle penetration
• (2)Low Vibration Design

Short tact time

Realized by high speed mapping

Reliability

• (1)Successfully Passed reliability test by ISMI
• (2)High repeatability of Door open / close accuracy
• (3)MCBF 600,000 cycles achieved

Compatibility

• (1)Applicable to various FOUPs and MACs (Entegris, Goudeng)
• (2)Ethernet communication and RS232C command control
• (3)E84 and CID communication

High Accuracy Mapping

Easy maintenance

• (1)PC based support software
• (2)Easy maintenance access from front
• (3)Communication log record function

Easy installation

• (1)BOLTS surface position adjustment mechanism
• (2)Undock position adjustment function
  (Adjustable to OHT line)
• (3)Self-standing caster as a standard function
• (4)Most ergonomic installation mechanism (Only one minutes to install)

Large indicator

Wide viewable LED indicators

* Ethernet is a trademark of Xerox Corporation.