Particle free

Original Door opening method prevents particle from penetrating into FOUP

Short tact time

Realized by high speed mapping

Reliability

• (1)Evaluation machine has successfully completed reliability testing by ISMI
• (2)Technology succeeds of 300mm SELOP load port series that plays an active role in the world's semiconductor factory

Compatibility

• (1)Applicable to various FOUPs and MACs
• (2)Ethernet communication Applicable, Command control using RS232C
• (3)N2 Purge function (option)

Originality

• (1)Highly accurate mapping technology
  (Wafer Presence, Double, Cross)
• (2)Thin wafer mapping capability

Easy maintenance

• (1)Supporting tool software using PC
• (2)High maintenance ability through front access to moving axes
• (3)Communication log function

Easy installation

• (1)BOLTS surface position adjustment mechanism
• (2)Undock position adjustment function
  (for adjustment with OHT line)
• (3)Self-standing caster as a standard function

Large indicator

Wide viewable LED indicators

* Ethernet is a trademark of Xerox Corporation.