Semiconductor

NEW

200mm Open Cassette Adapter
NEW OPTION TO SMART SELOP7
(KIT-SELOP08C25-S7 Series)

Handling 200mm Open Cassette at 300mm wafer Loadport

features

1.Easy Retrofit in FAB

※Working hour (1 load port): 3 hours
  • (1)Installing adapter with safety cover to carrier base
  • (2)Exchanging mapping sensor arm
    (Applicable to 200mm/300mm wafer sensing)
  • (3)Changing wafer protrusion sensor position

2.Preventing mechanism for wafer protrusion

  • (1)Vertical wafer placement by operator
  • (2)Stabilizing stage rotation with damper function

3.Preventing mechanism for Incorrect pick up

FOUP Clump structure (SEMI Standard) clumps open cassette during “Adaptor Stage Close” motion

4.Wafer mapping function

  • (1)Operable in SELOP-7
  • (2)Applicable for 200mm standard wafer and thin wafer

Operation Flow